Loading and unloading station for semiconductor processing installations

ABSTRACT

In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from containers under clean room conditions. These transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and transporting container are opened simultaneously in that the container cover and the closure are moved down jointy into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a division of application Ser. No 09/497,056, filed Feb. 2,2000, which is a continuation of application Ser. No. 09/003,025, filedJan. 5, 1998, now U.S. Pat. No. 6,071,059, which is a continuation ofapplication Ser. No. 08/615,386 filed Mar. 14, 1996, now U.S. Pat. No.5,772,386.

BACKGROUND OF THE INVENTION

a) Field of the Invention

The invention is directed to a loading and unloading station forsemiconductor processing installations with at least one closeablecharging opening through which wafer-shaped or disk-shaped objects whichare accommodated in a transporting container can be loaded, unloaded andreloaded after removing a closure, wherein the transporting container isprovided with a container cover which extends substantially at rightangles to the loading plane.

b) Description of the Related Art

For the purpose of charging semiconductor processing installations, itis known to use so-called SMIF boxes as magazine containers with arelatively small enclosed volume in which wafer magazines can be storedand transported. The box can be placed on an opening mechanism in anenclosure or housing which encloses one or more work stations so as tokeep them free of dust. The box and opening mechanism have closingelements which are adapted to one another and which can be openedsimultaneously one above the other so that dust particles resting on theoutside of the closing elements can be enclosed therebetween when thewafer magazines are lowered into the housing together with the twoclosing elements. The box itself encloses the opening formed in thehousing.

A loading and unloading device according to the German Patent 43 26 309C1, for example, or a device having another operating sequence serves toremove the magazines from the transporting containers and place them inthe processing installation. After the semiconductor wafers areprocessed, the magazines are transported back in the transportingcontainers.

The technique of SMIF boxes is especially suited for semiconductorwafers with smaller diameters, as is conventional. In view of thematerial characteristics of the semiconductor wafers, these SMIF boxesand the wafer magazines used with them are becoming increasinglyunsuitable as transporting containers as the diameter of semiconductorwafers increases. Transporting containers which take over the functionof magazines at the same time are already known for semiconductor wafersof this type. Loading, unloading and reloading of the semiconductorwafers is effected individually in a plane parallel to the surface ofthe semiconductor wafers, wherein the transporting container can beclosed by a container cover extending substantially at right angles tothe loading and unloading plane. Accordingly, in contrast to the SMIFbox, the container cover is removed and inserted laterally rather thanin a downward direction.

Since the transporting containers are enclosed by a space with lowrequirements as regards cleanness and since there are no magazines whichcan be loaded and unloaded such as those used in the SMIF technique, thecharging of semiconductor processing installations proceeding from thesetransporting containers and the transporting back from suchinstallations into the transporting containers presents problems.Moreover, the problem is exacerbated in that optional loading andunloading into and out of a greater number of transporting containersmust be ensured under certain circumstances and the containersthemselves must be supplied and removed by operating personnel underfavorably ergonomic conditions.

An arrangement for storing, transporting and inserting substrates isknown from EP 542 793 B1. In this arrangement, a cassette with a lateralclosing cap is arranged opposite a loading slot. The cassettes arebrought into the loading position one after the other by a lifting platewhich can hold a packet of stacked cassettes. When this position isreached, the closing cap is swiveled open at one edge and the substratewafer is inserted into the clean room by a drawer which can travel outof the cassette. An air flow exiting from the loading slot preventsparticles from penetrating into the clean room in that it passes throughan open gap between a protruding seal and the cassette.

OBJECT AND SUMMARY OF THE INVENTION

The primary object of the present invention is to ensure a charging ofsemiconductor processing installations proceeding from transportingcontainers under clean room conditions, these transporting containersthemselves serving as magazines for disk-shaped objects and being openlaterally. It should also be possible, optionally, to load and unload agreater quantity of such transporting containers, wherein the exchangeof transporting containers must be effected under favorable ergonomicconditions.

In a loading and unloading station for semiconductor processinginstallations with a closable charging opening through which disk-shapedobjects, which are accommodated in a transporting container, can beloaded, unloaded and reloaded after removing a closure, wherein thetransporting container is provided with a container cover whichsubstantially extends so as to be directed vertically to the loading andunloading plane, the object according to the present invention is met inthat the transporting container for loading, unloading and reloading ofdisk-shaped objects is coupled in a stationary manner by the containercover with the closure by means of an adhering engagement and asimultaneous opening of the charging opening and transporting containeris effected in that the container cover and the closure are moved downjointly into the semiconductor processing installation. The loading andunloading is carried out in that a manipulating device which is arrangedin the semiconductor processing installation engages through thecharging opening into the transporting container.

For the purpose of coupling with the closure, the transporting containeris deposited on a horizontally adjustable first platform which isprovided with means for aligning and securing the transportingcontainer.

The platform is adjustable between at least two planes which are locatedone above the other, one of which planes serves for charging with atransporting container at an ergonomic height, while the other servesfor loading and unloading the semiconductor processing installation.

In an advantageous manner, a suitable number of additional, horizontallyadjustable platforms which are provided with means for aligning andsecuring the transporting container can be provided for holding at leastone additional transporting container. At least one of the platformsserves alternately to couple a transporting container with the closure,while the others remain free for the exchange of transportingcontainers.

A storage is also advantageously provided for the exchange oftransporting containers, in which storage a gripper has optional accessto storage compartments or shelves which are arranged one above theother and a loading opening with a transporting container holder isprovided for manual charging with transporting containers. A spacecorresponding to the dimensions of a transporting container is left openadjacent to the storage shelves for transferring the transportingcontainers between the transporting container holder, storage shelves,and the platform. The transporting container holder should be able totravel out through the loading opening for the purpose of charging.

Further, the closure advantageously has vacuum suction devices forproducing the adhering engagement with the container cover and isprovided with elements for aligning relative to the container coverwhich can take effect before the adhering engagement is produced.

In order to open the transporting container, keys for actuating thelocking elements in the container cover project out of the closure,matching keyholes for these keys being provided in the container cover,by which the closure and container cover are secured above and beyondthe adhering engagement. The aligning elements and the keys can be heldin a springing manner vertically to the loading and unloading plane inorder to compensate for differences between the approach of the closureand the container cover.

Also, the charging opening is advantageously worked into a plate orshield which is adjustable, relative to the manipulating device, jointlywith the coupled transporting container for loading and unloading thedisk-shaped objects in a direction vertical to the loading and unloadingplane depending on the indexed positions. Accordingly, it is possible tocarry out the movement between the different planes as well as theindexing movements by means of an individual elevator.

However, it is also possible to construct the manipulating device forloading and unloading the disk-shaped objects in a direction vertical tothe loading and unloading plane depending upon the indexed positions.

By means of the described solution according to the invention,transporting containers of the type described above can be used withoutnegatively affecting the clean room conditions within the semiconductorprocessing installation to be charged. Semiconductor wafers withdimensions of 300 mm can be manipulated easily. Dust particles locatedon the container cover during the coupling with the closure are reliablyenclosed between the surfaces which are connected in an adheringengagement.

The invention will be explained more fully in the following withreference to the schematic drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

In the drawings:

FIG. 1 shows a basic side view of a loading and unloading station with adisplaceable shield;

FIG. 2 shows a top view of the loading and unloading station;

FIG. 3 shows a front view of the loading and unloading station;

FIG. 4 is a perspective view of a loading and unloading station with atransporting container in the coupled and opened state;

FIG. 5 is a view in partial section of a first device for opening andclosing a closure, shown in the closed state;

FIG. 6 shows a side view of the device according to FIG. 5 in the closedstate;

FIG. 7 shows a perspective view of a loading and unloading station withan additional platform and additional transporting container;

FIG. 8 shows a side view of the loading and unloading station accordingto FIG. 7;

FIG. 9 shows a side view of a storage for transporting containers;

FIG. 10 shows the storage in a perspective view and partially opened;

FIG. 11 shows a top view of an opened storage;

FIG. 12 shows a closure and a container cover;

FIG. 13 shows the preorientated coupling of the closure and thecontainer cover;

FIG. 14 shows a first variant of a clipped and partially cut-awaytransporting container;

FIG. 15 shows a section A—A through the transporting container accordingto FIG. 14;

FIG. 16 shows a second variant of a clipped and partially cut-awaytransporting container;

FIG. 17 shows a section B—B through the transporting container accordingto FIG. 16;

FIG. 18 shows a front view of a portion of a loading and unloadingstation with a second device for opening and closing a closure; and

FIG. 19 shows a top view of the device according to FIG. 18.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

In FIGS. 1 to 3, a frame 1 which is connected in a stationary mannerwith a wall element 2 by two angled frame elements 3, 4 carries anelevator 5.

Platforms 7 which are adjustable horizontally in the direction of thewall element 2 in a guide 8 which is secured at the elevator 5 serve asholding means for transporting containers 6 which can be shaped andoutfitted in different ways within certain limits. The platforms 7,whose quantity is not restricted to that shown herein, are movable bymeans of the elevator 5 between at least two planes 9 and 10 which aresituated one above the other. While plane 9 is situated at anergonomically favorable height for charging the platforms 7, thesemiconductor processing installation is loaded and unloaded in plane10. For this purpose, a charging opening 13 which can be closed by meansof a closure 12 is worked into a shield 11. The shield 11 is adjustablein a direction vertical to the plane 10 along the wall 2 so as to beguided by guide means 14 and performs a sealing function relative to theopening in the wall element 2. A transporting container 6 is coupled tothe closure 12 by its container cover 15 in an adhering engagement bymeans of the horizontal displacement of one of the platforms 7 in thedirection of the wall element 2. For this purpose, suction elements 16are incorporated in the closure 12, a hose connection, not shown,leading from the latter to a vacuum source.

The container cover 15 which is slid into and locked in the transportingcontainer 6 is surrounded by a seal 17 ensuring a seal relative to thesurrounding wall. Unlocking is effected after the adhering engagement isproduced, and the closure 12 can be moved down together with thecontainer cover 15 into the semiconductor processing installation in themanner indicated by an angled arrow.

Every transporting container 6 has shelves for receiving disk-shapedobjects 19, which shelves are situated one above the other and re formedby projections 18. In order to load and unload t e latter through thecharging opening 13 in plane 10, it s necessary in the constructionshown in FIG. 1 to adjust the vertical position of the transportingcontainer 6 in a suitable manner. For this purpose, the transportingcontainer 6 is additionally sealed externally relative to the shield 11by a seal 20, this shield 11 being carried along in turn by a verticalindexing movement which is likewise executed by means of the elevator 5.The clean room conditions within the semiconductor processinginstallation remain unimpaired as a result of the sealing function ofthe shield 11.

For the purpose of indexing, an index sensor 21 detects the projections18 and the disk-shaped objects 19 during the vertical adjustment of thetransporting container 6.

Loading and unloading is effected in plane 10 by means of a manipulatingdevice 22 arranged in the clean room region of the semiconductorprocessing installation by engaging through the charging opening 13.

In the loading and unloading station shown in FIG. 4, a device which isshown in more detail in FIG. 5 is used to open and close a closure 23. Atransporting container 24 which is already opened is deposited on aplatform 26 which is supported by a stationary plate 25 and isdisplaceable horizontally in the direction indicated by the arrow, thistransporting container 24 communicating with a charging opening 27 in awall element 28. The closure 23 is secured to an arm 29, which isadjustable vertically and relative to the wall element 28, and supportsa container cover 30 which is coupled by means of an adheringengagement. Driving and controlling elements for the loading andunloading station are accommodated in a housing 31.

According to FIG. 5, lifting cylinders 32 and 33 are provided forvertical adjustment and for adjusting the arm 29 relative to the wallelement 28, wherein the lifting cylinder 32 which is secured to asupport plate 34 is swivelable together with the support plate 34 aboutan axis X—X until reaching a stop 35 by means of the action of thelifting cylinder 33.

In FIG. 7, in contrast to the embodiment form according to FIG. 4 whichprovides for holding only one transporting container 24, supports 36which are secured to the plate 25 carry an additional stationary plate37 to which is fastened a second platform 38 which is displaceablehorizontally in the direction of the arrow. Another transportingcontainer which is closed by a transporting container cover 39 isdesignated by 40.

The two platforms 26, 37 are adjustable vertically via a supporting arm42 which is connected with the plate 25 and can be raised and lowered bya drive 41. While one of the platforms 26, 37 serves to couple atransporting container 24 or 38 to the closure 23, the other remainsavailable for the exchange of transporting containers.

Of course, the vertical adjustability shown in FIGS. 7 and 8 is alsoreadily applicable by a person skilled in the art to the constructionshown in FIG. 4 in that only one transporting container is adjustablebetween two planes. Similarly, the quantity of transporting containerswhich can be held can also be increased in accordance with therespective requirements.

A storage can be used for changing transporting containers in loadingand unloading devices according to FIGS. 4, 7 and 8 as is described morefully with reference to FIGS. 9 to 11.

The loading and unloading device is integrated in a wall 43 of a housing44 provided with storage shelves 45 which are arranged one above theother and serve to hold transporting containers 46. In the presentembodiment example, the storage is so constructed that the storageshelves 45 are arranged above the platforms of the loading and unloadingdevice regardless of the loading and unloading direction. For thepurpose of optional access to the transporting containers 46 in thestorage shelves 45, it is essential that a space 47 corresponding to thedimensions of the transporting containers 46 be left open between thestorage shelves 45 and a wall of the housing 44 other than wall 43. Thewall at which the space is left open is determined by the availablespace for storage.

In the present construction, the free space is located at a wall 48adjoining the wall 43 with the loading and unloading device so that astorage of small depth is formed. A lockable loading opening 50 which,in addition to a transporting container holder 52 which can be moved outon guides 51, serves for manually charging the storage with thetransporting containers 46 is worked into the wall 49 located oppositewall 43 at an ergonomic height.

According to FIG. 11, a gripper 53 which is movable vertically andhorizontally for transferring the transporting containers 46 is securedto a horizontal drive 55 by an extension arm 54. The horizontal drive 55is in turn connected with an elevator 56.

In the cover region, the transporting containers 46 have a handle 57 tobe grasped automatically by the gripper 53. Sufficient space is leftabove each transporting container 46 for the extension arm 54 to actwith the gripper 53 for transferring.

After a transporting container 46 is grasped, it is transportedhorizontally from the storage shelf 45 into the open space 47 and isthen transported vertically up to a plane which corresponds to theergonomic height for manually charging the storage or to a plane forcharging a platform of the loading and unloading device. When the planeis reached, the transporting container 46 is transferred to the platformor the transporting container holder 52 in the moved in position (FIG.11 shows the transporting container holder 52 in the moved outposition). Displacement in the opposite direction is effected in ananalogous manner.

According to FIGS. 2 and 13, the closure 23 has suction elements 59emerging from bore holes 58, aligning elements in the form of pin 60being arranged in the center thereof. Further, keys 61 wit a double-bitfor actuating locking elements 62 in the container cover 30 are providedin the closure 23. An elongated hole 63 and a bore hole 64 which areadapted to the pins 60 are incorporated in the container cover 30, asare corresponding keyholes 65 for the keys 61. For the purpose of apreorientated alignment of the container cover 30 relative to theclosure 23 during the coupling process, the pins 60 project beyond thesuction elements 59 or that the latter first engage in the elongatedhole 63 or in the bore hole 64. Subsequently, the keys 61 penetrate intothe keyholes 65, the suction elements 59 resting on the surface of thecontainer cover 30 by their projecting lips 66. During the suctionprocess which now takes place, in which the lips 66 move back completelyinto the bore holes 58 which are constructed with a sufficiently largediameter, the surfaces of the closure 23 and container cover 30 areconnected with one another in an adhering engagement and encloseadhering particles therebetween. By rotating the keys 61, a driver 67provided in the interior of the container cover 30 is actuated and opensthe locking elements 62. The closure 23 can be moved down into thesemiconductor processing installation together with the container cover30 so as to form a lock or transfer channel.

Apart from their opening function, the keys 61 exercise anotheradvantageous effect. After the keys 61 which are inserted into thekeyholes 65 are turned, the container cover 30 is also held, in theevent of a failure of the vacuum in the suction elements, in that thedouble-bit engages behind the keyholes 65. The lips 66 of the suctionelements 59 which expand again remain in tight contact with the surfaceof the container cover 30 so that both surfaces can be securely pressedtogether again immediately when the vacuum is restored. In order toprevent tensions during coupling, the aligning elements and the keys 61are additionally held in a springing manner inside the closure 23 whichis hollow inside.

Further advantageous steps for the coupling of the transportingcontainer will be seen from FIGS. 14 to 17. On the one hand, thetransporting container is deposited on the platform so as to be aligned.On the other hand, forces act on the transporting container during theopening process, as was explained, e.g., in the description referring toFIGS. 12 and 13, which forces must be compensated for in order toprevent disruption of the loading and unloading process.

In FIGS. 14 and 15, a transporting container 68 is deposited on aplatform 69 which corresponds in terms of function to the platformsshown in the Figures which were already described. The transportingcontainer 68 has shelves 70 in its interior for holding disk-shapedobjects. As was already mentioned with respect to the transportingcontainer in FIG. 11, a handle, designated in this instance by 71, foran automatically operating gripper is arranged in the over region.Aligning elements in the form of grooves 72 and engaging pins 73 whichare adapted to one another for the purpose of orientated placement areprovided in a three-point formation in the base of the transportingcontainer 68 and in the platform 69. During the horizontal couplingmovement of the transporting container 68, a springing roller 74 slidesat a contact pressure arm 75, which is stationary relative to theplatform 69, along a beveled crosspiece 76, which is secured at the baseat a distance therefrom, and fixes the transporting container 68. Visualorientation pegs 77 may be helpful if the transporting container 6 is tobe placed on the platform 69 manually.

Another way of securing a transporting container on the platform isprovided by a solution according to FIGS. 16 and 17. A key 79 which isguided through a bore hole 78 in the platform 69 penetrates through akeyhole 80 during the placement of the transporting container 68, thiskeyhole 80 being worked into a plate 81 which is fastened at the base ata distance therefrom, and engages behind the plate 81 after a closingmovement.

Another device for opening and closing a closure is described withreference to FIGS. 18 and 19, by means of which device the loading andunloading device can be decreased in depth. As in FIGS. 1 to 3, thisembodiment example employs a shield, the charging opening being workedinto this shield. However, it is also possible to use a stationarycharging opening in combination with this device. Although the chargingopening is open, a coupled transporting container deposited on aplatform is not shown for the sake of simplicity.

The shield with the charging opening, designated in this instance by 82and 83, is supported by a frame 84 via guides 85 and guide slides 86. Aclosure 87 for the charging opening 83 is fastened, via an arm 88, to arotor axle 89 which is driven by a rotary drive 90. The rotary drive 90is screwed to a holding plate 91 which is displaceable in the loadingand unloading direction by means of a horizontal guide 92 on a supportplate 93 which is connected with the frame 84 in a stationary manner.The displacement is effected by means of a suitable drive 94, e.g., apneumatic drive.

The shield 82 is advantageously designed so as to be reinforced in theregion of the charging opening 83 and covers an opening in a wall 95 towhich the frame 84 is fastened. The opening, which is not visible, isdimensioned vertically so as to allow a vertical adjustment of thecharging opening 83 along the entire opening height. Accordingly, amanipulating device which is arranged in a stationary manner can achieveaccess through the charging opening in different indexed planes of acoupled transporting container.

A labyrinth seal 96 performs a sealing function during the adjustment ofthe shield 82, one portion of the labyrinth seal 96 being secured so asto adjoin the opening in the wall 95 while the other portion is securedat the adjustable shield 82.

A driver 98 for the platform, which driver 98 can be actuated by apneumatic cylinder 97, is fastened at the shield 82 for the purpose ofcoupling the transporting container. After the platform has been movedalong with the transporting container into the coupling region, it isgrasped by the driver 98. By means of the lift of the pneumatic cylinder97, the transporting container, which is fixed on the platform, ispressed, with its container cover, against the closure 87 which is stillin the closing state. The closure 87 and the container cover areconnected with one another in an adhering engagement, as has alreadybeen described, and the locking elements in the container cover areopened.

When actuated by the drive 94, the support plate 93 is displacedtogether with the elements fastened thereto so hat the closure 87,together with the container cover, is removed from the charging opening83. The closure 83 is driven by the motor 9 so as to rotate into aposition in which the charging opening is free for loading and unloadingthe disk-shaped objects. This position corresponds to that shown in FIG.18.

While the foregoing description and drawings represent the preferredembodiments of the present invention, it will be obvious to thoseskilled in the art that various changes and modifications may be madetherein without departing from the true spirit and scope of the presentinvention.

What is claimed is:
 1. A method of connecting a portable semiconductortransport container to a loading and unloading station, the methodcomprising steps of: removably connecting the transport container to asupport; positioning the transport container at a frame of the loadingand unloading station, the step of positioning comprising locating afront side end of a housing of the transport container at a side openingthrough the frame, and positioning a movable closure of the loading andunloading station and a side cover of the transport container againsteach other, wherein the movable closure is located at the opening, andthe side cover is located in an aperture at he front side end of thehousing, and wherein an arm is connected to the closure for moving theclosure relative o the side opening; and moving the arm in at least twodifferent directions angled relative to each ther to move the closurerelative to the side opening from a closed position to an open position;and moving the side cover with the closure.
 2. A method as in claim 1wherein the step of removably connecting comprises connecting a base ofthe housing of the transport t container against the support.
 3. Amethod as in claim 2 wherein the step of removably connecting comprisesconnecting the base to the support in a formation of at least threealignment connections.
 4. A method as in claim 1 further comprisingpositioning a key of the closure into a keyhole in the cover.
 5. Amethod as in claim 4 further comprising suction holding the cover to theclosure.
 6. A method as in claim 4 comprising positioning an alignmentmember from the closure into a hole the cover.
 7. A method as in claim 1wherein the step of moving the closure comprises moving the closure inat least two directions relative to each other.
 8. A method as in claim1 wherein the step of positioning comprises the support horizontallymoving the transport container.
 9. A method as in claim 1 wherein thestep of positioning comprises the support vertically moving thetransport container.
 10. A method as in claim 1 wherein the step ofpositioning comprises the frame having a vertically movable shield withthe side opening extending through the shield, wherein the front sideend of the housing is located at the shield.
 11. A method as in claim 1wherein the step of positioning comprising the frame having a sealaround the side opening and locating the front side end of the housingagainst the seal.
 12. A method as in claim 1 wherein the step of movingthe side cover with the closure moves the cover simultaneously with heclosure.
 13. A method of connecting a movable closure for an opening ina loading and unloading station for a semiconductor processinginstallation with a removable cover of a semiconductor subs ratetransport container, the method comprising steps of: providing theclosure with at least one alignment element extending outward from acover contacting side of the closure and at least one rotatable key,independent from the at least one alignment element, extending outwardfrom the cover contacting side; positioning the cover contacting side ofthe closure and the cover at each other, the step of positioningcomprising, each of the at least one alignment elements projecting intoa respective hole in the cover and each of the at least one rotatablekeys projecting into respective keyholes in the cover.
 14. A method ofconnecting a movable closure for an opening in a loading and unloadingstation for a semiconductor processing installation with a removablecover of a semiconductor substrate transport container, the methodcomprising steps of: providing the closure with at least one alignmentelement extending outward from a cover contacting side of the closureand at least one rotatable key extending outward from the covercontacting side; positioning the over contacting side of the closure andthe cover at each other, the step of positioning comprising each of theat least one alignment elements projecting into a respective hole in thecover and each of the at least one rotatable keys projecting intorespective keyholes in the cover, wherein the step of positioningcomprises the at least one rotatable key projecting into its keyholeonly after the at least one alignment element first starts to projectinto its hole.
 15. A method of connecting a movable closure for anopening in a loading and unloading station for a semiconductorprocessing installation with a removable cover of a semiconductorsubstrate transport container, the method comprising steps of: providingthe closure with at least one alignment element extending outward from acover contacting side of the closure and at least one rotatable keyextending outward from the cover contacting side; positioning the overcontacting side of the closure and the cover at each other, the step ofpositioning comprising each of the at least one alignment elementsprojecting into a respective hole in the cover and each of the at leastone rotatable keys projecting into respective keyholes in the cover; andsuction holding the cover to the closure.
 16. A method as in claim 13further comprising moving the at least one key to locate a portion ofthe key behind a portion of he cover behind the keyhole.
 17. A method ofconnecting a movable closure for an opening in a loading and unloadingstation for a semiconductor processing installation with a removablecover of a semiconductor substrate transport container, the methodcomprising steps of: providing the closure with at least one keyextending laterally outward from a cover contacting side of the closure;positioning the cover contacting side of the closure and the cover ateach other; positioning the key into a keyhole of the cover; andactuating a locking element driver inside the cover by the key.
 18. Amethod as in claim 17 wherein the step of providing comprises theclosure having at least two of the keys spaced from each other.
 19. Amethod as in claim 17, wherein the step of actuating comprises rotatingthe key.
 20. A method as in claim 17 further comprising vacuum holdingthe cover to the closure.
 21. A method as in claim 17 further comprisinginserting an alignment member of the closure into a hole in the cover.22. A method as in claim 17 comprising locating a portion o the keybehind a portion of the cover inside the cover behind the keyhole.
 23. Amethod of retaining a removable cover of a semiconductor substratetransport carrier with a movable closure of a loading and unloadingstation, the method comprising steps of: positioning a ember extendingin a general lateral direction from he closure into a hole in the coverand into an interior space of the cover behind the hole; and moving themember inside the hole and the interior space to locate a portion of themember behind a portion of the cover behind the hole such that themember will retain the cover with the closure.
 24. A method as in claim23 further comprising applying a suction holding of the cover with theclosure.
 25. A method as in claim 23 wherein the member comprises arotatable key which, when moved inside the interior space, moves alocking element driver inside the interior space.
 26. A method as inclaim 23 further comprising supporting the cover directly on the memberafter the member is inserted into the hole.
 27. A method as in claim 23further comprising: positioning a second member extending in the generallateral direction from the closure into a second hole in the cover a dinto the interior space of the cover behind the second hole; and movingthe second member inside the second hole and the interior space tolocate a portion of the second member behind portion of the cover suchthat the second member will retain the cover with the closure.
 28. Amethod as in claim 23 further comprising positioning an alignment pinextending from the closure into an alignment pin receiving hole in thecover before inserting the member into its hole.
 29. A method foraccessing substrates in a portable semiconductor transport container ata loading and unloading station, the method comprising steps of:positioning a front side of the transport container at a chargingopening in a frame of the loading and unloading station, the front sideof the transport container being located at a first lateral side of thecharging opening; moving a closure of the loading and unloading stationfrom a first position at a second opposite lateral side of the chargingopening to a second position, the first position substantially blockingthe charging opening and the second position not substantially blockingthe charging opening; and moving a front side cover of the transportcontainer with the closure from the front side of the transportcontainer, through the charging opening, and out of the charging openingpast the second lateral side of the charging opening, the front sidecover being moved with the closure so that the front side cover remainsgenerally facing the second lateral side of the charging opening.
 30. Amethod as in claim 29 further comprising removably connecting thetransport container to a support of the loading and unloading stationcomprising connecting a base of a housing of the transport container tothe support in a formation of at least three alignment connections. 31.A method as in claim 30 further comprising connecting the closure to thecover by relative horizontal movement of the transport container and theclosure towards each other.
 32. A method for accessing substrates in aportable semiconductor transport container at a loading and unloadingstation, the method comprising steps of: positioning a front side of thetransport container at a charging opening in a frame of the loading andunloading station, the front side of the transport container beinglocated at a firs lateral side of the charging opening; moving a closureof the loading and unloading station from a first position at a secondopposite lateral side of the charging opening to a second position, thefirst position substantially blocking the charging opening and thesecond position not substantially blocking the charging opening;connecting the closure to a front side cover of the transport containerby relative horizontal movement of the transport container and theclosure towards each other; and moving a front side cover of thetransport container with the closure from he front side of the transportcontainer, through the charging opening, and out of the charging openingpast the second lateral side of the charging opening wherein the step ofconnecting comprises positioning at east one key, extending laterallyoutward from the closure, into at least one respective keyhole in thecover.
 33. A method as in claim 32 wherein met the step of connectingfurther comprises moving the at least one key in the cover to move alocking element of the cover.
 34. A method as in claim 32 wherein thestep of connecting further comprises suction holding the cover to theclosure.
 35. A method as in claim 32 wherein the step of connectingfurther comprises inserting an alignment member of the closure into ahole in the cover before the key enters the keyhole.
 36. A method as inclaim 31 wherein the step of connecting comprise suction holding thecover to the closure.
 37. A method as in claim 31 wherein the step ofconnecting further comprises inserting an alignment member of theclosure into a hole in the cover before suction holding starts to occur.38. A method as in claim 29 wherein the step of moving the closurecomprises moving the closure in a first path away from the chargingopening and moving the closure in a second path angled away from thefirst path.
 39. A method as in claim 29 wherein, when the cover is movedpast he second lateral side of the charging opening, the step of movingthe front side cover comprises moving the cover in a downward direction.40. A method as in claim 29 wherein the step of moving the front sidecover comprises simultaneously moving the front side cover with theclosure through the charging opening.
 41. A method for accessingsubstrates in a portable semiconductor transport container at a loadingand unloading station, the method comprising steps of: positioning alateral side of the transport container at a first lateral side of anopening through a frame of the loading and unloading station; moving aclosure at a second lateral side of the opening from a first positionsubstantially blocking the opening to a second position notsubstantially blocking the opening; and moving a cover of the transportcontainer from the lateral side of the transport container through theopening and out of the opening past the second side of the opening whilea main housing of the transport container and substrates housed in themain housing remain at the first lateral side of the opening, the coverbeing moved in at least two different directions angled relative to eachother so that the cover remain generally facing the second side of theopening.
 42. A method as in claim 41 wherein the step of moving thecover comprises simultaneously moving the cover with the closure throughthe opening.
 43. A method of opening a substrate container having aremovable front side cover comprising steps of: positioning a front sideof the substrate container at a charging opening of a frame of a loadingand unloading station, the loading and unloading station comprising amovable closure for opening and closing a horizontal path for movingsubstrates through the charging opening, wherein the step of positioningat least partially aligns the front side cover of the substratecontainer with the closure; connecting the front side cover and themovable closure to each other; and moving the front side cover with themovable closure out of the horizontal path, the front side coverremaining generally facing in a horizontal direction when being moved.44. A method of opening a substrate container having a removable frontside cover comprising steps of: positioning a front side of thesubstrate container at a charging opening of a frame of a loading andunloading station, the loading and unloading station comprising amovable closure for opening and closing a horizontal path for movingsubstrates through the charging opening, wherein the step of positioningat least partially aligns the front side cover of the substratecontainer with the charging opening; moving the closure to open thehorizontal path through the charging opening; and removing the frontside cover from the substrate container and moving the front side coverthrough the charging opening and out of the horizontal path through thecharging opening, the front side cover being moved in at least twodifferent directions angled relative to each other so that duringmovement the front side cover remains generally facing in a horizontaldirection.
 45. A method as is claim 44 wherein the step of moving thefront side cover comprises simultaneously moving the front side coverwith the closure.